EUV Tech

EUV Tech, founded in 1997, develops extreme ultraviolet (EUV) and soft x-ray instrumentation and techniques. The company's work is focused on semiconductor manufacturing and material science, providing specialized metrology tools critical to these industries.

The company's product portfolio includes at-wavelength EUV metrology tools, such as reflectometers, scatterometers, and actinic mask imaging systems. It also offers the Lithometrix SuMMIT Software Suite for rigorous off-line analysis of metrology data. These instruments have been in operation at customer facilities for over 25 years.

EUV Tech's technical domains encompass EUV metrology, soft x-ray instrumentation, semiconductor metrology, and at-wavelength metrology. The company maintains a global presence, serving clients worldwide.